Oxford Instruments

Oxford Instruments Plasma Technology


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This course starts on Monday 23rd March 2026.

The course lasts for 3 days.

PlasmaPro ASP Familiarisation ASP-1

An introductory-level course designed for those seeking to gain familiarity and develop their knowledge of the PlasmaPro ASP platform.

Starts: Monday 23rd March 2026

9:00am to 3:30pm

Duration: 3 days

Oxford Instruments Plasma Technology, Govier Way , Western Approach Distribution Park , Severn Beach , BS35 4GG

Summary

Health & Safety

  • Working safely around the tool
  • General hazard awareness
  • Precursor awareness

Process Overview

  • Atomic Layer Deposition basics

System Overview

  • General system overview
  • Theory of operation

Hardware Description

  • Location of main hardware components and devices
  • Description of main hardware components and devices
  • Safety and equipment interlocks
  • Electrical schematics

Maintenance

  • Recommended maintenance schedules
  • Parts removal and replacement

PTIQ Control Software

  • General overview
  • GUI description

This course is free.

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